Micromachines sensors

By applying the techniques of integrated circuit fabrication it has become possible to manufacture micro and nano-scale devices and systems for sensors and actuators.

Professor S Taylor

The potential range of applications for such devices is enormous and represents a growing market worldwide. In collaboration with other university departments, and with industry we are currently developing a micro engineered quadropole mass spectrometer for use in a range of both low and ultra high vacuum applications. This is the smallest of its type in the world. End on cross section of the MEMS QMS World’s smallest quadrupole mass spectrometer with mass filter showing metallised optical fibre electrodes miniature detector and ion source and MEMS mass filter held in position between etched silicon wafers.


Smallest Mass SpectrometerMicromachined Sensors

The world's smallest quadrupole mass spectrometer

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