FEI Helios Nanolab 600i dualbeam

FEI Helios Nanolab 600i dualbeam FIB/SEM

Utilising an Elstar UHR Immersion Lens column with Schottky field emission source operating from 0.2 to 30 kV and offering a <1nm resolution at 15kV, and <2.5nm at 1kV.

Key features include:

  • Secondary and Backscatter electron imaging using, ETD, in-lens (TLD), Ion Conversion and Electron (ICE) detectors, and retractable concentric BSE detector (CBS)
  • Chemical and crystallographic information obtained with EDAX Octane Pro EDX detectors and EDAX EBSD DigiView with integrated EBSD/EDX TEAM analysis software.
  • Beam deceleration with stage bias from -50 V to -4 kV
  • Integrated plasma cleaner
  • Gallium source ion column (0.5 – 30 kV) offering 5 nm milling and image resolution
  • Gas injection systems (GIS) for Pt deposition and selective carbon etch
  • AutoTEM software and Omniprobe lift-out system for TEM sample preparation
  • Auto Slice and View and Amira/Avizo software for 3D data collection and reconstruction
  • Specialist holders allow for mounting of 1.5” epoxy pucks, samples in cross-section, and analysis of TEM grids.

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