Electron Microscopy Laboratory – EBSD-SEM

Electron Microscopy

Electron Microscopy (Waterhouse building, Block C): The university-wide SEM shared research facility (SEM SRF) offers the latest technologies and long-standing expertise in the development and application of electron backscatter diffraction (EBSD) to materials’ research. We collaborate with national and international researchers and industrial partners on electron microscopy topics in Earth and environmental sciences, engineering, physical sciences, and health and biosciences.


For questions or information on using these facilities, please contact Elisabetta Mariani: mariani@liverpool.ac.uk

Instruments and Capabilities 

Philips XL30 tungsten filament SEM 

  • Electron backscatter diffraction (EBSD) for the determination of full crystallographic orientations. EBSD and EDS can be performed simultaneously. 
  • Exact Silicon drift detector (solid state) for qualitative and semi-quantitative EDS; 
  • Secondary and Backscatter Electron Imaging (SEI and BEI);
  • Cathodoluminescence (CL);  

CamScan X500 CrystalProbe field emission gun (FEG) SEM 

  • F+ Nordlys EBSD detector combined with the AZtec Oxford Instrument acquisition system for high resolution, high speed EBSD analyses (600 points/sec). With EBSD we can determine the full crystallographic orientation of rocks, metals and ceramics; 
  • X-Max 50 mm silicon drift detector for fast EDS analyses; 
  • EBSD and EDS can be acquired simultaneously at speeds of 400 points/sec. 
  • Hot stage for heating experiments up to 1100°C, with simultaneous in-situ imaging and EBSD-EDS; 
  • The tilted column geometry with horizontal stage allows us to perform EBSD-EDS on large specimens (10 x 10 cm); 
  • Hot deformation stage (prototype), with simultaneous in-situ imaging and EBSD-EDS; 
  • A new stage for EBSD-EDS mapping of cylindrical surfaces (prototype), can be used with experimental and small core samples.   

Other equipment 

  • Carbon coater for thin and thick carbon layer deposition;
  • Gold/palladium coater for multiple samples; 
  • Fine grain-size mechanical and chemical polishing equipment for final stage polishing  

For more information visit the Electron Microscopy website